Imaging by Electron Scanning Microscopy (SEM)

SEM with BSE (annular, YAG crystal, 0.1 atomic resolution), SE (Everhart-thornley type, YAG crystal), current (pA meter) and EDS detectors.

Electromagnetic optics:

1. Electron source: W filament (cartridge)
2. High voltage range: 200 V - 30 kV
3. Magnification: 4.5 - 1.000.000X
4. Resolution: 3 nm @ 30 kV, 8 nm @ 3 kV
5. Vue field: 7.7 mm @ 10 mm WD, 24 mm @ 30 mm WD
6. Current: 1 pA - 2 μA

Working modes: Resolution, Depth, Field, Wide Field, Electron Channeling

Vacuum:

1. Working pressure: < 9x10-3 Pa (only high vacuum mode available)
2. Evacuation time: < 3 min

Chamber:

1. Sample mount: “euccentric” type; holder accepts 4 standard aluminium stubs
2. Axis: X = 45mm – motorised, Y = 45mm - motorised, Z = 27mm manual, Z’ = 6mm manual
3. Rotation: 360º
4. Tilt: +90o e -90o
5. Maximum sample height: 36mm

Note: this instrument works only in high vacuum mode; non-conduttive samples should be coated with a thin metallic layer before examining to avoid build-up of charge. A sputter/coater is available at the site to perform such coating.